As an innovator in the field of micro- and nano-scale photothermal characterization and in-situ physical testing, Waviks is committed to expanding multi-dimensional in-situ excitation and analysis capabilities for scanning electron microscopy (SEM).

Aiming at the thermal/optical failure problems of third/fourth generation semiconductors (GaN, SiC, gallium oxide, diamond, etc.), micro-nano photoelectric devices, and advanced packaging, Waviks Vesta integrates high-precision local optical excitation, laser in-situ heating, and related spectral analysis depth seamlessly into the electron microscope cavity.

The system upgrades the traditional static morphology observation electron microscope to a dynamic physics experimental platform, which can efficiently carry out micro-area photoelectric response analysis, laser annealing process simulation, FIB ion beam damage repair, and in-situ characterization of thermal stress evolution at the nanoscale, providing a strong microscopic mechanism support for semiconductor material research and development and failure analysis.